NEWS
12/27
2021
レーザーテック株式会社より、KEN OKUYAMA DESIGN が筐体デザインを行なったコンフォーカル顕微鏡自動検査/
半導体材料などの自動欠陥検査〜高倍率欠陥レビュー〜
Lasertec Corporation has announced the OPTELICS AI2, a confocal microscope automatic inspection/review system designed by KEN OKUYAMA DESIGN.
It seamlessly realizes automatic defect inspection, high-magnification defect review, and 3D shape measurement of semiconductor materials in a single unit, and is expected to play an active role in various scenes from R&D to production.